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  • 產(chǎn)品名稱：EMS硅晶圓71893-02

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  • 產(chǎn)品廠商：美國EMS
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詳情介紹：

These ultra-flat wafers can be used for substrate studies or as substrate for AFM and SEM samples by cleaving the wafer.

Specifications

4" 6" 8"
Material: Silicon Silicon Silicon
Diameter: 100 mm 150 mm 200 mm
Orientation: <100> <100> <100>
Type/Dopant: P/Boron P/Boron P/Boron
Grade: Prime/CZ Virgin Prime/CZ Virgin Prime/CZ Virgin
Growth Method: CZ CZ CZ
Resistivity: 10-20 Ohm-cm 10-20 Ohm-cm 10-20 Ohm-cm
Thickness: 525μm ±20μm 675μm ±20μm 725μm ±20μm
TTV: <4.00μm <4.00μm <4.00μm
SFPD: <2.0μm <2.0μm <2.0μm
Warp: ≤30μm ≤30μm ≤30μm
Bow: ≤30μm ≤30μm ≤30μm
Particles: ≤20@≥0.3μm ≤20@≥0.3μm ≤20@≥0.3μm
Front Surface: Polished Polished Polished
Back Surface: Etched Etched Etched
Flat: 2 per SEMI Standard 1 per SEMI Standard 2 per SEMI Standard
Site Flatness: <2.0μm <2.0μm <2.0μm
Roughness: Typically 2-3? Typically 2-3? Typically 2-3?

Ordering

71893-01 Ultra-Flat Silicon Wafer, 4" each
71893-02 Ultra-Flat Silicon Wafer, 6" each
71893-03 Ultra-Flat Silicon Wafer, 8" each
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